Radio-frequency plasma potential variations originating from capacitive coupling from the coil antenna in inductively coupled plasmas

Autor:	D. M. Shaw, M. Watanabe, H. Sugai, G. J. Collins
Rok vydání:	1999
Předmět:	Capacitive coupling Chemistry Waves in plasmas Capacitive sensing Analytical chemistry General Physics and Astronomy Physics::Plasma Physics Physics::Space Physics Plasma channel Capacitively coupled plasma Electromagnetic electron wave Inductively coupled plasma Atomic physics Plasma actuator
Zdroj:	Journal of Applied Physics. 85:3428-3434
ISSN:	1089-7550 0021-8979
Popis:	The radio-frequency plasma potential in a stove top inductively coupled plasma source is measured by a capacitive probe. The experimental results are compared to a crude circuit model which accounts for capacitive coupling between the rf coil and the bulk plasma. The capacitive coupling model has three terms: the dielectric window capacitance, the sheath capacitance between the dielectric window and the bulk plasma, and the bulk plasma to ground sheath capacitance. The crude circuit model predictions are verified by quantitative comparison with the measured rf plasma potential in the bulk argon plasma at pressures from 1 to 20 mTorr and radio-frequency (13.56 MHz) plasma power levels from 60 to 1000 W. Finally, the measured ion energy spectrum, as determined by a retarding potential analyzer, agrees with rf plasma potential measurements over the entire range of experimental conditions.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d8e5b5ecb5996668cdaed99dc085a687 https://doi.org/10.1063/1.369700 Zobrazit plný text záznamu