Electron conduction of microcracks in dielectrics

Autor: Vladimir M. Maslovsky, Jury O. Lichmanov
Rok vydání: 1995
Předmět:
Zdroj: Thin Solid Films. 257:134-136
ISSN: 0040-6090
Popis: The current-voltage characteristics of a defect metal-oxide-semiconductor, (MOS) structure (e.g. after breakdown) can be explained by electron transport through localized states formed by broken bonds. The density of states decreases exponentially below the mobility threshold. Comparing the experimental I– V curve with the theoretical power dependence, a good agreement is found between the microcrack length (about 0.1-0.3 μm) and the microdefect size in the silicon subsurface region.
Databáze: OpenAIRE