Analysis of Cluster Growth in Magnetron-sputtering Metal-cluster Source by Optical Emission Spectroscopy

Autor:	Satoshi Kono, Akira Terasaki, Masashi Arakawa
Rok vydání:	2019
Předmět:	Metal Optical emission spectrum Chemistry visual_art Analytical chemistry Cluster (physics) visual_art.visual_art_medium General Chemistry Optical emission spectroscopy Plasma Sputter deposition Mass spectrometry
Zdroj:	Chemistry Letters. 48:1537-1540
ISSN:	1348-0715 0366-7022
DOI:	10.1246/cl.190727
Popis:	We investigate cluster-growth processes in a magnetron-sputtering cluster source by employing silver as a target metal. An optical emission spectrum of discharge plasma is measured along with a mas...
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d88284fef143a403462799069a3ce4b3 https://doi.org/10.1246/cl.190727 Zobrazit plný text záznamu