Maskless lithography: an approach to SU-8 based sensitive and high-g Z-axis polymer MEMS accelerometer
| Autor: | Satinder K. Sharma, Robin Khosla, Dhairya Singh Arya, Mandeep Jangra |
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| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Frequency response Materials science business.industry 02 engineering and technology Spring (mathematics) 021001 nanoscience & nanotechnology Condensed Matter Physics Accelerometer 01 natural sciences Capacitance Electronic Optical and Magnetic Materials Hardware and Architecture 0103 physical sciences Optoelectronics Sensitivity (control systems) Electrical and Electronic Engineering 0210 nano-technology business Laser Doppler vibrometer Maskless lithography |
| Zdroj: | Microsystem Technologies. 27:2925-2934 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | In this work, Z-axis MEMS accelerometers are investigated with variation in spring topography. The serpentine spring structure demonstrated the optimum sensitivity of MEMS accelerometers due to a large number of beams that reduce the spring constant considerably. The augmented serpentine spring MEMS accelerometers are simulated for SU-8, PolySi, Si3N4, and SiC-based primary structural materials. SU-8 based MEMS accelerometer shows high sensitivity and cost-effective fabrication process suitable for industry. The reliability of the microaccelerometers is investigated by the stress analysis. The computation result of designed accelerometers exhibited a linear response up to ± 50 g of the input value of acceleration. For the integration with Si-technology, SU-8 microaccelerometer with serpentine spring structure is fabricated using facile maskless lithography based grayscale process technology. The sensitivity is measured by capacitance variation with Z-axis free falls. The frequency response and spring constant of fabricated SU-8 based Z-axis MEMS accelerometer is investigated by Laser Doppler Vibrometer and nanoindentation technique, respectively. The demonstrated SU-8 serpentine spring, highly sensitive, facile and low-cost process technology-based Z-axis accelerometer is suitable for navigation, space, and medical applications. |
| Databáze: | OpenAIRE |
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