| Autor: |
Edward Preisler, Farnood Rezaie, Yasir Qamar, Minoli Pathirane, Sina Soltanmohammad, Ron Tang, Oleg Martynov |
| Rok vydání: |
2022 |
| Zdroj: |
Optical Fiber Communication Conference (OFC) 2022. |
| DOI: |
10.1364/ofc.2022.th3c.5 |
| Popis: |
Aspects of silicon photonics process technologies intended for high volume production in a traditional silicon electronics-driven foundry environment are discussed. Both technological and economical challenges associated with this juxtaposition of a complex, non-standard process technology, inside of a factory geared for producing thousands of standardized electronics-based wafers per month, are described in detail. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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