Autor:	Edward Preisler, Farnood Rezaie, Yasir Qamar, Minoli Pathirane, Sina Soltanmohammad, Ron Tang, Oleg Martynov
Rok vydání:	2022
Zdroj:	Optical Fiber Communication Conference (OFC) 2022.
Popis:	Aspects of silicon photonics process technologies intended for high volume production in a traditional silicon electronics-driven foundry environment are discussed. Both technological and economical challenges associated with this juxtaposition of a complex, non-standard process technology, inside of a factory geared for producing thousands of standardized electronics-based wafers per month, are described in detail.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d84c9e5294ca464ebb2ac9e84902897d https://doi.org/10.1364/ofc.2022.th3c.5 Zobrazit plný text záznamu