Development of a linear encoder based on common-optical-path design

Autor:	Pei-Chieh Chen, Hung-Lin Hsieh, Ju-Yi Lee
Rok vydání:	2022
Zdroj:	Optics and Photonics for Advanced Dimensional Metrology II.
DOI:	10.1117/12.2621450
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d8412440e4ad37b4692269c392a573d8 https://doi.org/10.1117/12.2621450 Zobrazit plný text záznamu