Optical and luminescence properties of polymer-like a-C:H films deposited in a dual-mode PECVD reactor
| Autor: | R. Etemadi, J.L. Fave, Bernard Drevillon, Christian Godet, T. Heitz, J. Cernogora, Jean-Eric Bourée |
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| Rok vydání: | 1996 |
| Předmět: |
Photoluminescence
Chemistry Analytical chemistry Physics::Optics Substrate (electronics) Plasma Condensed Matter Physics Ion source Electronic Optical and Magnetic Materials Condensed Matter::Materials Science Amorphous carbon Physics::Plasma Physics Plasma-enhanced chemical vapor deposition Materials Chemistry Ceramics and Composites Thin film Luminescence |
| Zdroj: | Journal of Non-Crystalline Solids. :623-627 |
| ISSN: | 0022-3093 |
| DOI: | 10.1016/0022-3093(95)00776-8 |
| Popis: | Butane has been decomposed in the post-discharge of a helium-argon microwave plasma, assisted by a radiofrequency (rf) plasma. The ion bombardment on the substrate, monitored by the rf power, is found to control the optical and luminescence properties of hydrogenated amorphous carbon (a-C:H) thin films: the extinction coefficient of a-C:H increases with rf power while the photoluminescence efficiency decreases by three orders of magnitude. The parametrization of the dielectric function, using a three-phase effective medium approximation, is discussed in relation to the expected size effects on the dielectric function of the π-bonded clusters. |
| Databáze: | OpenAIRE |
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