Optimization of micromechanical accelerometer structures
Autor: | V. V. Alekseeva, M. A. Kalinin, A. A. Papko |
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Rok vydání: | 2011 |
Předmět: | |
Zdroj: | Measurement Techniques. 54:240-245 |
ISSN: | 1573-8906 0543-1972 |
Popis: | This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures. Modelling confirms a reduction in the effect of parasitic MIS structures in measurement circuits based on pulsed charge balancing. |
Databáze: | OpenAIRE |
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