Optimization of micromechanical accelerometer structures

Autor: V. V. Alekseeva, M. A. Kalinin, A. A. Papko
Rok vydání: 2011
Předmět:
Zdroj: Measurement Techniques. 54:240-245
ISSN: 1573-8906
0543-1972
Popis: This article demonstrates the feasibility of optimizing the choice of known measurement circuits using as a criterion the minimum value of a functional of the square of the difference between the ideal conversion function of the circuit being studied and a conversion function that includes the effect of parasitic semiconductor structures. Modelling confirms a reduction in the effect of parasitic MIS structures in measurement circuits based on pulsed charge balancing.
Databáze: OpenAIRE