Influence on the laser induced backside dry etching of thickness and material of the absorber, laser spot size and multipulse irradiation
| Autor: | N. Kresz, Cs. Vass, Tamás Csizmadia, Zs. Márton, Béla Hopp, Tomi Smausz |
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| Rok vydání: | 2007 |
| Předmět: |
Materials science
Excimer laser business.industry medicine.medical_treatment General Physics and Astronomy chemistry.chemical_element Surfaces and Interfaces General Chemistry Condensed Matter Physics Laser Fluence Copper Surfaces Coatings and Films law.invention Surface micromachining Optics chemistry Aluminium law medicine Optoelectronics Irradiation Dry etching business |
| Zdroj: | Applied Surface Science. 254:1091-1095 |
| ISSN: | 0169-4332 |
| Popis: | Laser induced backside dry etching method (LIBDE) was developed – analogously to the well-known laser induced backside wet etching (LIBWE) technique – for the micromachining of transparent materials. In this procedure, the absorbing liquid applied during LIBWE was replaced with solid metal layers. Fused silica plates were used as transparent targets. These were coated with 15–120 nm thick layers of different metals (silver, aluminium and copper). The absorbing films were irradiated by a nanosecond KrF excimer laser beam through the quartz plate. The applied fluence was varied in the 150–2000 mJ/cm2 range, while the irradiated area was between 0.35 and 3.6 mm2. At fluences above the threshold values, it was found that the metal layers were removed from the irradiated spots and the fused silica was etched at the same time. In our experiments, we investigated the dependence of the main parameters (etch rate and threshold) of LIBDE on the absorption of the different metal layers (silver, copper, aluminium), on the size of the irradiated area, on the film thickness and on the number of processing laser pulses. |
| Databáze: | OpenAIRE |
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