Computer simulation of surface modification with ion beams

Autor:	Mititaka Terasawa, Ahmed Hassanein, Zinetulla Insepov, David Richard Swenson
Rok vydání:	2005
Předmět:	Nuclear and High Energy Physics Molecular dynamics Gas cluster ion beam Sputtering Chemistry Atom Coulomb explosion Surface modification Atomic physics Kinetic energy Instrumentation Ion
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 241:496-500
ISSN:	0168-583X
Popis:	Interactions of energetic ions with various solid targets including silicon and a few metal surfaces were studied by computer simulation and verified by experiment. Surface sputtering and modification for collisions of Arn (n ∼ 100) cluster ions, with kinetic energies of 12–54 eV/atom, and slow highly charged ions (HCI), with potential energies of 80–3500 eV, have been simulated. Various energy transfer mechanisms of the ion energy into the solid target, such as shock wave generation, hollow atom formation, Coulomb explosion, charge screening and neutralization were studied. Atomistic molecular dynamics (MD), as well as a phenomenological surface dynamics methods were employed and the results of the simulations were compared with the experimental data.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d803995844bb7ad4d71d8151ff55fb94 https://doi.org/10.1016/j.nimb.2005.07.061 Zobrazit plný text záznamu Full Text from ScienceDirect