| Autor: |
Duohong Chen, Junbo Wang, Zhenyuan Sun, Guanglei Li, Jian Chen, Luzhao Chen |
| Rok vydání: |
2017 |
| Předmět: |
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| Zdroj: |
2017 IEEE SENSORS. |
| DOI: |
10.1109/icsens.2017.8234154 |
| Popis: |
This paper presents a monolithic three axial electrochemical micro seismic sensor. In response to the vibration along different axes, the outputs of four sensing units are different and through the decoupling of the differences between them formed by different vibration, the vibration along a certain axis can be detected from the mixed one. Because of the decoupling sensing mechanism with four sensing units, the monolithic electrochemical sensor is featured with an extremely small volume, which is different from the common three axial sensor with the huge one. Micro-Electro-Mechanical System technology is used in the fabrication of the electrodes in sensing units. The sensitivity magnitude of x and y axis can reach 2503 V/m/s and 2305 V/m/s at 30Hz and the sensitivity of z axis was 3887 V/m/s at 20Hz. The great independence was proved by the huge ratios of the outputs along the input axis and the other axes in response to the input vibration. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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