Fabrication and characterisation of embedded metal nanostructures by ion implantation with nanoporous anodic alumina masks

Autor:	Chris Jeynes, Jay Ghatak, Umananda M. Bhatta, Ian M. Ross, Wei Guan, Beverley J. Inkson, Günter Möbus, Yong Peng, Nianhua Peng
Rok vydání:	2013
Předmět:	Aluminium oxides Nuclear and High Energy Physics Nanostructure Ion implantation Fabrication Materials science Nanoporous Transmission electron microscopy Nanotechnology Instrumentation Fluence Anode
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 307:273-276
ISSN:	0168-583X
DOI:	10.1016/j.nimb.2013.02.046
Popis:	Lateral ordered Co, Pt and Co/Pt nanostructures were fabricated in SiO2 and Si3N4 substrates by high fluence metal ion implantation through periodic nanochannel membrane masks based on anodic aluminium oxides (AAO). The quality of nanopatterning transfer defined by various AAO masks in different substrates was examined by transmission electron microscopy (TEM) in both imaging and spectroscopy modes. © 2013 Elsevier B.V. All rights reserved.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d7ff249f77f66c09b321a061a4494d59 https://doi.org/10.1016/j.nimb.2013.02.046 Zobrazit plný text záznamu Full Text from ScienceDirect