A new method of analysis of DLTS-spectra

Autor: R. Langfeld
Rok vydání: 1987
Předmět:
Zdroj: Applied Physics A Solids and Surfaces. 44:107-110
ISSN: 1432-0630
0721-7250
DOI: 10.1007/bf00626409
Popis: We propose a new algorithm to obtain the energy and the capture cross section of a deep trap in the band gap of a semiconductor from deep-level transient spectroscopy (DLTS) measurements. This numerical method requires only a single temperature cycle with a fixed rate window for data acquisition. It is capable to resolve DLTS signals with a shoulder, generated by two trap levels. Experiments with Schottky barrier diodes onn-GaAs demonstrate the contribution of a second trap to the EL6 level in GaAs and the superior reliability in cases of non-negligible resistivity of the back-contacts compared to conventional Arrhenius plot method.
Databáze: OpenAIRE