High-speed InP/lnGaAs heterojunction bipolar transistor utilizing nonalloyed contacts on n+-InP contacting layers

Autor: C. A. Martino, Milton Feng, D.A. Ahmari, M.T. Fresina, Douglas W. Barlage, S. Thomas, G. E. Stillman
Rok vydání: 1996
Předmět:
Zdroj: Journal of Electronic Materials. 25:1637-1639
ISSN: 1543-186X
0361-5235
DOI: 10.1007/bf02655589
Popis: We have demonstrated a high-speed InP/lnGaAs heterojunction bipolar transistor with nonalloyed TiPtAu contacts on n+-InP emitter and collector contacting layers. The use of SiBr4 as a silicon doping source enabled the formation of low resistance (pc
Databáze: OpenAIRE