Vapor-Phase Chemical Etching of Silicon Assisted by Graphene Oxide for Microfabrication and Microcontact Printing
| Autor: | Wataru Kubota, Ryoya Yamaoka, Toru Utsunomiya, Takashi Ichii, Hiroyuki Sugimura |
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| Rok vydání: | 2022 |
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| Zdroj: | ACS Applied Nano Materials. 5:11707-11714 |
| ISSN: | 2574-0970 |
| DOI: | 10.1021/acsanm.2c02690 |
| Databáze: | OpenAIRE |
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