Selective Detection of Backscattered Electrons in the Compound Lens Equipped UHR SEM

Autor:	Adrian Sandu, Lubomir Tůma, Radovan Vašina, Petr Wandrol, Ernst Jan Vesseur
Rok vydání:	2016
Předmět:	010302 applied physics Optics Materials science business.industry 0103 physical sciences 02 engineering and technology Electron 021001 nanoscience & nanotechnology 0210 nano-technology business 01 natural sciences Instrumentation
Zdroj:	Microscopy and Microanalysis. 22:576-577
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927616003731
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d7c144d9fd2662986825a06603d0eeaa https://doi.org/10.1017/s1431927616003731 Zobrazit plný text záznamu