A Comparative Analysis of Different Diaphragm Shaped for MEMS Capacitive Pressure Sensor
| Autor: | Tahar Lahreche, Malika Kandouci, Yacine Hadjadj |
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| Rok vydání: | 2022 |
| Zdroj: | 2022 19th International Multi-Conference on Systems, Signals & Devices (SSD). |
| DOI: | 10.1109/ssd54932.2022.9955750 |
| Databáze: | OpenAIRE |
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