On the metal cluster formation in ionized cluster beam deposition

Autor: J. Wong, S.-N. Yang, S.-N. Mei, Toh-Ming Lu, C.-H. Choi
Rok vydání: 1988
Předmět:
Zdroj: Journal of Crystal Growth. 87:357-364
ISSN: 0022-0248
DOI: 10.1016/0022-0248(88)90188-1
Popis: An attempt has been made to measure Mg clusters formed by the supersonic jet expansion from a heated crucible using the retarding potential technique. The experiment was performed in a typical ionized cluster beam (ICB) deposition system. With Mg deposition up to 50 A/s on a substrate 30 cm away from the source, we failed to observe abundance of large clusters (≥100 atoms/cluster). Our numerical calculations of the cluster size distribution during supersonic jet expansion based on a step-wise cluster growth model show that for an expansion angle of 20°, large cluster formation becomes appreciable only if the stagnation pressure is larger than 10 Torr. This condition implies a deposition rate of 1000 A/s. This deposition rate is difficult to achieve in a single chamber system without differential pumping. Our results are compared with previous reports on the metal cluster size measurement using retarding potential and other techniques.
Databáze: OpenAIRE