Design review of an infrared phase-shifting interferometer

Autor: Paul R. DeStefano, H. Philip Stahl, Charles Joenathan, Arthur B. Western
Rok vydání: 1992
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.140937
Popis: The design and system performance of an infrared phase-stepping interferometer is reviewed. This instrument is capable of measuring rms surface roughness with a repeatability of 0.02 waves. The instrument uses a 4-bucket unwrapping algorithm. Calibration of the interferometer and removal of inherent system aberrations are discussed along with the system performance, including repeatability and accuracy. The interferometer is an all-reflective optics design to permit use at any wavelength, accommodating both far- (10.6 micron) and near- (5 micron) infrared sources. Testing applications include infrared windows and surface testing.
Databáze: OpenAIRE