Transition characteristics to Arc Discharge of KrF Excimer-Laser Pumping Discharge

Autor:	Shinichi Sakakibara, Ken Yukimura
Rok vydání:	1996
Předmět:	Electric arc Materials science Excimer laser medicine.medical_treatment medicine Electric discharge Electrical and Electronic Engineering Atomic physics
Zdroj:	IEEJ Transactions on Fundamentals and Materials. 116:705-711
ISSN:	1347-5533 0385-4205
DOI:	10.1541/ieejfms1990.116.8_705
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d769ca14de72327b4a4ba78f9269a3bb https://doi.org/10.1541/ieejfms1990.116.8_705 Zobrazit plný text záznamu