Development of electron-Stimulated Desorption Time-of Flight(ESD-TOF) System Operating in 10-10Pa

Autor:	Kazue Takahashi, Shinjiro Ueda, Kenji Okada
Rok vydání:	1994
Předmět:	Materials science Detector Analytical chemistry chemistry.chemical_element Electron Condensed Matter Physics Surfaces Coatings and Films Ion Desorption time chemistry Cathode ray Microchannel plate detector Electrical and Electronic Engineering Electron gun Titanium
Zdroj:	SHINKU. 37:514-519
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.37.514
Popis:	An ESD-TOF measuring system has been developed to operate in 10-10 Pa. The system is fabricated from commercial-grade type 304 stainless steel. It is evacuated by TMP and TSP, the latter having 99.99% pure titanium source to generate 6.5 × 10-10 Pa at room temperature without LN2. An electron gun and an ion detector (micro channel plate) were baked at more than 250°C and were defferentially evacuated independent of each other. When an electron beam of 300 eV and 0.5 microamperes was emitted continuously, the pressure rise was only 3 × 10-10 Pa. It took only about two seconds to obtain a clear ESD ion spectrum of 90, 000 times cumulation from a multicrystal titanium target when electron beam pulses of 100ns width, 300 eV and 0.5 microamperes were emitted at 50 kHz.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d769544a1abef1426acb4dd633ea0e39 https://doi.org/10.3131/jvsj.37.514 Zobrazit plný text záznamu