| Autor: |
P.W. Mason, A.S. Oates, Feng Li, Yuan Chen, Yi Ma |
| Rok vydání: |
2003 |
| Předmět: |
|
| Zdroj: |
1999 IEEE International Integrated Reliability Workshop Final Report (Cat. No. 99TH8460). |
| DOI: |
10.1109/irws.1999.830568 |
| Popis: |
Jramp test and high-field constant voltage stress test are evaluated for both quick reliability assessment and in-line production monitoring. Although the conducting mechanism for both tests are at the Fowler-Nordheim tunneling regime, high-field constant voltage stress test is found to be a more sensitive test than Jramp for in-line production monitor. This can be explained by the nature of Jramp itself based on analysis using accumulative law. By using the dual V-t model to extract reliability information, this paper shows that Jramp can be also used to compare the absolute oxide reliability for different technologies. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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