Data Visualization of Anomaly Detection in Semiconductor Processing Tools

Autor:	Shu-Kai S. Fan, Du-Ming Tsai, Chih-Hung Jen, Chia-Yu Hsu, Fei He, Li-Ting Juan
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Transactions on Semiconductor Manufacturing. 35:186-197
ISSN:	1558-2345 0894-6507
DOI:	10.1109/tsm.2021.3137982
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d74c94a0204dc3864735a56d35b5a292 https://doi.org/10.1109/tsm.2021.3137982 Zobrazit plný text záznamu