Microcontact printing of indium metal using salt solution 'ink'
| Autor: | Reuben T. Collins, Thomas F. Kuech, C. G. Allen, A.A. Khandekar, I. C. Schick, E. J. Schick, Joseph D. Beach, J. C. Dorr |
|---|---|
| Rok vydání: | 2007 |
| Předmět: |
Materials science
Silicon business.industry Annealing (metallurgy) Metals and Alloys chemistry.chemical_element Nanotechnology Surfaces and Interfaces Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Semiconductor chemistry law Microcontact printing Materials Chemistry Photolithography business Forming gas Ohmic contact Indium |
| Zdroj: | Thin Solid Films. 515:6812-6816 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2007.02.070 |
| Popis: | Poly(dimethlysiloxane) stamps were made from Si masters fabricated using photolithography and anisotropic etching. GaCl 3 and In(NO 3 ) 3 were microcontact printed onto Si substrates, creating arrays of micron size metal salt deposits. The In(NO 3 ) 3 deposits were further processed by annealing in an N 2 :H 2 (9:1) forming gas environment at 600 °C which converted the deposits into In metal. The ability to inexpensively pattern metal arrays on semiconductor surfaces has implications for ohmic contacts and, with additional processing, arrays of semiconductor crystallites for optoelectronic applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect