16nm FinFET DUV Detector Array in Fully Compatible FinFET Logic Process

Autor:	Wei-Hwa Lin, Jiaw-Ren Shih, Jonathan Chang, Yih Wang, Perng-Fei Yuh, Ya-Chin King, Chrong Jung Lin
Rok vydání:	2023
Zdroj:	2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d7107f73b45d5ec05e3b2333a2259460 https://doi.org/10.1109/vlsi-tsa/vlsi-dat57221.2023.10134105 Zobrazit plný text záznamu