Simple technique for out-of-focus feature alignment

Autor: Douglas A. Baillie, Jose M. Sasian
Rok vydání: 1995
Předmět:
Zdroj: Optical Engineering. 34:564
ISSN: 0091-3286
DOI: 10.1117/12.194047
Popis: A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 μm or better.
Databáze: OpenAIRE