Simple technique for out-of-focus feature alignment
Autor: | Douglas A. Baillie, Jose M. Sasian |
---|---|
Rok vydání: | 1995 |
Předmět: | |
Zdroj: | Optical Engineering. 34:564 |
ISSN: | 0091-3286 |
DOI: | 10.1117/12.194047 |
Popis: | A simple technique for in-line alignment of features that are axially separated is discussed. The precision of the technique is 2.5 μm or better. |
Databáze: | OpenAIRE |
Externí odkaz: |