| Popis: |
By developing several alloys with the composition TbxDy1-x, (Fex, Mn1-y)n, a giant magnetostriction actuator was manufactured. The output power of them is several times and the displacement is several ten times as much as PZT without a magnifier. A temperature controller to keep a fluctuation of the cooling water within 10m°C was developed for the actuator. An ultra-precise machine tool was also developed. equipping the present actuator. The depth of cut can be set with the accuracy of several nanometers by the actuator and cut by a turning diamond tool. The hard and brittle materials such as glass and ceramics were finished in ductile mode, and the surface roughness was obtained within several nanometers. |
