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The gauge block can realize the length of an object with the interferometric method.When light reflects on the measuring surface, the lag of phase occurs due to optical characteristics and surface roughness of the test piece. It is necessary to ad this correction value to the optical length obtained by the measurement. The investigation is carried out whether the phase shift correction used for steel gauge block to gauge block made of new material 'ceramics'.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
