Gas Sensing Using Heterogeneously Integrated Quantum Cascade Lasers on Silicon

Autor: Charles D. Merritt, Chul Soo Kim, William W. Bewley, Alexander Spott, Christopher C. Evans, John E. Bowers, Igor Vurgaftman, Jerry R. Meyer, Michael B. Frish, Joel M. Hensley
Rok vydání: 2018
Předmět:
Zdroj: Conference on Lasers and Electro-Optics.
DOI: 10.1364/cleo_si.2018.stu3n.1
Popis: We demonstrate tunable diode-laser absorption spectroscopy (TDLAS) gas sensing near 4.8 μm using a distributed-feedback quantum cascade laser heterogeneously integrated on a silicon-on-nitride-on-insulator platform. This platform enables sensors operating at wavelengths up to 6.7 μm.
Databáze: OpenAIRE