Pelgrom-Based Predictive Model to Estimate Metal Grain Granularity and Line Edge Roughness in Advanced Multigate MOSFETs

Autor:	Enrique Comesaña Figueroa, Natalia Seoane, Antonio Garcia-Loureiro, Julián García Fernández
Rok vydání:	2022
Předmět:	Electrical and Electronic Engineering Electronic Optical and Magnetic Materials Biotechnology
Zdroj:	IEEE Journal of the Electron Devices Society. 10:953-959
ISSN:	2168-6734
DOI:	10.1109/jeds.2022.3214928
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d6d557804692f5baf418afd34a88321f https://doi.org/10.1109/jeds.2022.3214928 Zobrazit plný text záznamu