A Study on Electrochemical Machining Method in Ultrapure Water. Electrochemical Machining of Cathode Surface

Autor:	Yasushi Toma, Yuzo Mori, Kikuji Hirose, Taketo Nishimura, Itsuki Kobata, Hidekazu Goto
Rok vydání:	2002
Předmět:	Materials science Adsorption Chemical engineering Machining law Chemisorption Etching (microfabrication) Mechanical Engineering Ultrapure water Electrochemical machining Cathode Anode law.invention
Zdroj:	Journal of the Japan Society for Precision Engineering. 68:1241-1245
ISSN:	1882-675X 0912-0289
DOI:	10.2493/jjspe.68.1241
Popis:	In order to develop a new ultra-precision and ultra-clean machining method, we studied electrochemical machining in ultrapure water. In this paper, we newly performed electrochemical machining in ultrapure water under the cathode specimen condition to understand the interaction with H atom. We found that Al and Si specimen whose surfaces are oxidized under the anode condition are etched off under the cathode condition. It was also confirmed that pH value near the cathode is basic (pH=9) in the experiment. These results indicated that OH molecule is generated at cathode surface, which is concerned in the etching mechanism of cathode surface with H atom. As the result of these experiment, we proposed that etching mechanism of cathode specimen condition is as follows, (1) Adsorption of H atoms on the cathode surface, (2) Generation of OH molecules at cathode surface, (3) Chemisorption of OH molecules to the H-adsorbed cathode surface and etching off the surface atom.
Databáze:	OpenAIRE
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