First Use of NTD Germanium-Based Microcalorimeters For High-Resolution, Broadband X-Ray Microanalysis

Autor:	Mark LeGros, Norm Madden, Eugene Haler, Gerry Austin, Eric H. Silver, Jeffrey W. Beeman
Rok vydání:	1997
Předmět:	X-ray spectroscopy Silicon business.industry Chemistry Scanning electron microscope Resolution (electron density) Analytical chemistry chemistry.chemical_element Germanium Tungsten Electron excitation Optoelectronics Thin film business Spectroscopy
Zdroj:	X-Ray Spectrometry. 26:265-268
ISSN:	1097-4539 0049-8246
Popis:	Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Kα from the tungsten Mα x-rays. This performance will make it possible to analyze efficiently the composition of thin films and surface contaminants by using low electron excitation energies.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d669d80c3addc8be129b557024b9f3b9 https://doi.org/10.1002/(sici)1097-4539(199709)26:5<265::aid-xrs204>3.0.co Zobrazit plný text záznamu Plný text