First Use of NTD Germanium-Based Microcalorimeters For High-Resolution, Broadband X-Ray Microanalysis
Autor: | Mark LeGros, Norm Madden, Eugene Haler, Gerry Austin, Eric H. Silver, Jeffrey W. Beeman |
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Rok vydání: | 1997 |
Předmět: | |
Zdroj: | X-Ray Spectrometry. 26:265-268 |
ISSN: | 1097-4539 0049-8246 |
Popis: | Broadband, high-resolution x-ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium-based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Kα from the tungsten Mα x-rays. This performance will make it possible to analyze efficiently the composition of thin films and surface contaminants by using low electron excitation energies. |
Databáze: | OpenAIRE |
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