Nano-structuring and modification with a focused helium ion beam

Autor:	Colm C. Faulkner, Hongzhou Zhang, Yanhui Chen, Daniel Fox
Rok vydání:	2012
Předmět:	Ion beam deposition Materials science Ion beam Nano structuring chemistry business.industry Optoelectronics chemistry.chemical_element business Instrumentation Focused ion beam Helium
Zdroj:	Microscopy and Microanalysis. 18:826-827
ISSN:	1435-8115 1431-9276
DOI:	10.1017/s1431927612005983
Popis:	Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d663e51a82c36fbebc53c34d6f75791e https://doi.org/10.1017/s1431927612005983 Zobrazit plný text záznamu