Structural Characterization of Strained Silicon Substrates by X-Ray Diffraction and Reflectivity

Autor:	M. Erdtmann, T. A. Langdo, M. T. Bulsara, Christopher J. Vineis, H. Badawi
Rok vydání:	2003
Předmět:	Crystallography Materials science X-ray crystallography Strained silicon Reflectivity Characterization (materials science)
Zdroj:	Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d64cfd26981b7ff5b2101974a49df949 https://doi.org/10.7567/ssdm.2003.d-6-2 Zobrazit plný text záznamu