Status of laminar grating manufacturing via lithography at HZB

Autor:	Tino Seliger, O. Kutz, B. Nelles, F. Senf, Stephanie Lemke, Bernd Loechel, Ph. Goettert, I. Rudolph
Rok vydání:	2014
Předmět:	Engineering Fabrication business.industry Synchrotron radiation Take over Micro fabrication Grating Condensed Matter Physics Electronic Optical and Magnetic Materials Laser interference lithography Optics Hardware and Architecture Electrical and Electronic Engineering business Lithography
Zdroj:	Microsystem Technologies. 20:2061-2064
ISSN:	1432-1858 0946-7076
Popis:	In 2009 Carl Zeiss stopped the manufacture of precision gratings. All users of precision gratings were very concerned about this decision, since they all need such gratings for their experiments. One of the institutes of the HZB, the Institute for Nanometer Optics and Technology (INT), has extensive experience in micro fabrication (technology group). In spring 2010, HZB decided to take over the old C. Zeiss grating fabrication and build up its own technology center for grating fabrication. Using governmental support, HZB has installed all necessary equipment and processes to fabricate high quality gratings for the synchrotron radiation community.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d64a542eace5cf4f7774202e19d69673 https://doi.org/10.1007/s00542-013-2061-z Zobrazit plný text záznamu Full text from SpringerLink