III/V-on-Bulk-Si Technology for Commercially Viable Photonics-Integrated VLSI
| Autor: | Yong-hwack Shin, Dong-Jae Shin, Jinmyoung Kim, Kyoung-ho Ha, Jungho Cha, Changgyun Shin, Kyunghyun Son, Hyunil Byun, Hyuck Choo, In-Oh Hwang, Dongshik Shim, Chang-Bum Lee, Eun-Kyung Lee, Bongyong Jang, Ji San Lee |
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| Rok vydání: | 2020 |
| Předmět: |
Optical amplifier
Very-large-scale integration Materials science Silicon photonics 020205 medical informatics business.industry Hardware_PERFORMANCEANDRELIABILITY 02 engineering and technology 01 natural sciences Photodiode law.invention 010309 optics CMOS law 0103 physical sciences Hardware_INTEGRATEDCIRCUITS 0202 electrical engineering electronic engineering information engineering Optoelectronics Wafer Photonics business Diode |
| Zdroj: | 2020 IEEE Symposium on VLSI Technology. |
| Popis: | We have demonstrated a complete set of on-chip Si-photonic components using our III/V-on-bulk-silicon (Si) technology. Our bulk-Si-based technology shows unrivaled CMOS compatibility and much improved thermal dissipation, leading to superior performance over the III/V-on-SOI technology at a fraction of cost. The components demonstrated on the bulk-Si platform include single & tunable wavelength laser diodes, semiconductor optical amplifiers, Ge & III/V photodiodes, modulators, waveguides, and couplers. Fabrication of Si-photonics components are all carried out on the same bulk wafers that will host CMOS ICs, and all the fabricated components show robust performance in experimental characterizations. Using these bulk-Si components, a solid-state beam scanner for the light detection and ranging (LiDAR) system is currently under development. The III/V-on-bulk-Si technology will open a new path for silicon photonics to share and enjoy the colossal infrastructure and remarkable commercial success of the CMOS technology in coming years. |
| Databáze: | OpenAIRE |
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