Bayesian approach to determine critical dimensions from scatterometric measurements

Autor:	Sebastian Heidenreich, Hermann Gross, Markus Bär
Rok vydání:	2018
Předmět:	010309 optics Computer science 0103 physical sciences Bayesian probability General Engineering 02 engineering and technology Data mining 021001 nanoscience & nanotechnology 0210 nano-technology computer.software_genre 01 natural sciences computer
Zdroj:	Metrologia. 55:S201-S211
ISSN:	1681-7575 0026-1394
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d615b5ce0653e13fb1b8613152f73197 https://doi.org/10.1088/1681-7575/aae41c Zobrazit plný text záznamu