Impedance measurement system for a microwave-induced plasma

Autor:	Young Ho Na, Jae Duk Kim, Jin Joo Choi, Hyoung Jong Kim, Sang Hoon Kim, Suk Woo Shin
Rok vydání:	2012
Předmět:	Materials science business.industry Circulator General Physics and Astronomy Electrical reactance Input impedance Optics Physics::Plasma Physics Transmission line Power dividers and directional couplers Standing wave ratio business Electrical impedance Microwave
Zdroj:	Journal of the Korean Physical Society. 60:907-911
ISSN:	1976-8524 0374-4884
DOI:	10.3938/jkps.60.907
Popis:	An impedance measurement system for an atmospheric microwave-induced plasma is proposed using equivalent transmission line theory and a de-embedding process of an input impedance. An argon plasma was generated by using a microwave-induced discharge. The generator consists of a 2.45 GHz solid state power oscillator (SSPO), a circulator, a directional coupler, a three-stub tuner, a gas flow meter, and a plasma jet. The microwave source power was varied from 10 to 25 W, and the argon gas flux was varied from 1 to 5 L/min at atmospheric pressure. The experimental results for the microwave-induced plasma show the impedance behaviors of the resistance and the inductive reactance. The near unity voltage standing wave ratio (VSWR) from the experiment results ensures that the proposed measurement system is valid.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d60696817c4674fc173306b95c1387c2 https://doi.org/10.3938/jkps.60.907 Zobrazit plný text záznamu Full text from SpringerLink