Controlled Geometry Nanopore Fabrication in Silicon Nitride Membranes With a Transmission Electron Microscope

Autor:	Shaurya Prakash, Eugene Sosnov, Subba Rao Karavadi
Rok vydání:	2009
Předmět:	Materials science Fabrication Nanotechnology Geometry law.invention Dwell time Nanopore chemistry.chemical_compound Membrane Silicon nitride chemistry law Transmission electron microscopy Electron microscope
Zdroj:	Volume 12: Micro and Nano Systems, Parts A and B.
DOI:	10.1115/imece2009-11281
Popis:	Fabrication of controlled geometry solid-state nanopores (SSNs) using a transmission electron microscope (TEM) is described. Controlling nanopore geometry allows for optimization of the shape and structure of the pore based on the need for specific applications. By manipulating TEM parameters such as current, relative stage settings, and dwell time it is possible to manufacture controlled geometry SSNs in silicon nitride (Si3 N4 ) membranes. Nanopores with circular, elliptical, and triangle-like cross-sectional areas were fabricated.Copyright © 2009 by ASME
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d5fe3f5689ffc795553d66c223fd4d18 https://doi.org/10.1115/imece2009-11281 Zobrazit plný text záznamu