| Autor: |
Dominic Ashworth, Xibin Zhou, Patrick P. Naulleau, Yashesh Shroff, Greg Denbeaux, Yudhi Kandel, Ryan Miyakawa, Kevin Cummings, Yu-Jen Fan, Michael Goldstein |
| Rok vydání: |
2014 |
| Předmět: |
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| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| Popis: |
We present an update of the AIS wavefront sensor, a diagnostic sensor set for insertion in the upgraded 0.5 NA SEMATECH Albany and Berkeley METs. AIS works by using offset monopole illumination to probe localized regions of the test optic pupil. Variations in curvature manifest as focus shifts, which are measured using a photodiode- based grating-on- grating contrast monitor, and the wavefront aberrations are reconstructed using a least-squares approach. We present results from an optical prototype of AIS demonstrating an accuracy of better than λ/30 rms for Zernike polynomials Z4 through Z10. We also discuss integration strategies and requirements as well as specifications on system alignment. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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