Synthesis of Zirconium Diboride Films and ZrB2/BC x N y Heterostructures
| Autor: | Marina Kosinova, V. A. Shestakov, V. S. Sulyaeva, Yu. M. Rumyantsev |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Zirconium diboride
Zirconium Materials science General Chemical Engineering Metals and Alloys Analytical chemistry chemistry.chemical_element 02 engineering and technology Partial pressure Chemical vapor deposition Atmospheric temperature range 010402 general chemistry 021001 nanoscience & nanotechnology Borohydride 01 natural sciences Decomposition 0104 chemical sciences Inorganic Chemistry chemistry.chemical_compound chemistry Materials Chemistry Thin film 0210 nano-technology |
| Zdroj: | Inorganic Materials. 54:133-139 |
| ISSN: | 1608-3172 0020-1685 |
| Popis: | Using mechanochemical synthesis, we have prepared zirconium borohydride, Zr(BH4)4, as a precursor for ZrB2 film growth by chemical vapor deposition. We have carried out the thermodynamic modeling of phase formation processes in the Zr–B–(N)–H and Zr–B–(N)–H–O systems in a wide temperature range, from 100 to 2500°C, at various p(H2)/p(Zr(BH4)4) and p(NH3)/p(Zr(BH4)4) partial pressure ratios in the starting gas mixtures. A process has been proposed for the growth of zirconium diboride films by Zr(BH4)4 decomposition using two techniques: chemical vapor deposition and plasma-enhanced chemical vapor deposition. We also developed a process for the growth of multilayer ZrB2-and BC x N y -based structures. |
| Databáze: | OpenAIRE |
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