Impact of FinFET with plural number of channel width using novel one step of trench formation process on pattern design time and works for system LSI
| Autor: | Yu Hiroshima, Shigeyoshi Watanabe |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Fluid Flow and Transfer Processes
Computer Networks and Communications Computer science Health Toxicology and Mutagenesis General Engineering Process (computing) One-Step 06 humanities and the arts Channel width 060202 literary studies 03 medical and health sciences 0302 clinical medicine 0602 languages and literature Trench Electronic engineering General Materials Science 030212 general & internal medicine Social Sciences (miscellaneous) Plural |
| Zdroj: | Contemporary Engineering Sciences. 11:5039-5046 |
| ISSN: | 1314-7641 1313-6569 |
| DOI: | 10.12988/ces.2018.810541 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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