Latest developments for the CAMECA ULE-SIMS instruments: IMS Wf and SC-Ultra

Autor:	A. Merkulov, Bernard Rasser, M. Schuhmacher, P. Peres, E. de Chambost
Rok vydání:	2004
Předmět:	Materials science business.industry Analytical chemistry General Physics and Astronomy Optoelectronics Wafer Surfaces and Interfaces General Chemistry Repeatability Measurement repeatability Condensed Matter Physics business Surfaces Coatings and Films
Zdroj:	Applied Surface Science. :949-953
ISSN:	0169-4332
DOI:	10.1016/j.apsusc.2004.03.202
Popis:	SIMS depth profiles for full wafer analyses were carried out on the CAMECA IMS Wf instrument. Experiments have been performed in order to investigate the analytical performance of this SIMS instrument for shallow, medium and deep profiles in terms of measurement repeatability and sample throughput. First results using a cassette loader option implemented on the IMS Wf are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d5501a38255fc5e126df272794918137 https://doi.org/10.1016/j.apsusc.2004.03.202 Zobrazit plný text záznamu Full Text from ScienceDirect