Cleaning of carbon contamination on multilayer optics of EUVL

Autor:	彭忠琦 Peng Zhong-qi, 卢启鹏 Lu Qi-peng, 宋源 Song Yuan, 龚学鹏 Gong Xue-peng, 王依 Wang Yi
Rok vydání:	2017
Předmět:	Materials science Carbon contamination Optics business.industry Extreme ultraviolet lithography business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Precision Engineering. 25:2835-2844
ISSN:	1004-924X
DOI:	10.3788/ope.20172511.2835
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d5330178afffab84cdb41c1e14462538 https://doi.org/10.3788/ope.20172511.2835 Zobrazit plný text záznamu