Characterization and In-Situ Test of Mechanical Properties of MEMS-Based Inertial Delay Slider Mechanism

Autor:	Zhao Xiaolin, Wang Kai, Dai Xuhan, Ding Guifu, Guangyuan Wang
Rok vydání:	2021
Předmět:	Microelectromechanical systems In situ Mechanism (engineering) History Materials science Inertial frame of reference Slider Mechanical engineering Computer Science Applications Education Characterization (materials science)
Zdroj:	Journal of Physics: Conference Series. 1739:012036
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/1739/1/012036
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d52c69c36da773612816684ab7007986 https://doi.org/10.1088/1742-6596/1739/1/012036 Zobrazit plný text záznamu