Detection and analysis of airborne acoustic signals in direct laser interference patterning

Autor:	Udo Klotzbach, Tobias Steege, Andrés Fabián Lasagni, Tim Kunze, Sabri Alamri
Rok vydání:	2021
Předmět:	Autofocus Optics Materials science Acoustic emission business.industry law Laser interference business law.invention
Zdroj:	Laser-based Micro- and Nanoprocessing XV.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::d4dfc12a30e9e55e5018a9a470c30e87 https://doi.org/10.1117/12.2587162 Zobrazit plný text záznamu