Advances in matrix‐lens technology

Autor: W. C. Hughes, H. G. Parks
Rok vydání: 1975
Předmět:
Zdroj: Journal of Vacuum Science and Technology. 12:1161-1164
ISSN: 0022-5355
DOI: 10.1116/1.568482
Popis: Recent improvements in matrix‐lens technology are reported in this paper. Previously, the lenslets have been of the three‐aperture einzel construction. An extensive computer study of three‐aperture einzel and two‐aperture immersion lenses has been made at the General Electric Research and Development Center. Calculations, based on data from this study, demonstrate significant electron‐optical advantages for two‐aperture immersion lenslets as opposed to three‐aperture einzel lenslets. Experimental data verifying the two‐aperture immersion‐ lenslet operation are presented. Application of the two‐aperture immersion matrix lens in a sealed tube environment is also presented and discussed.
Databáze: OpenAIRE