Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters
| Autor: | H. Kitayoshi, Hiroki Kuwano, R. Ohigashi, N. Moriwaki, L. V. Minh, O. Shimada |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
History Materials science Piezoelectric coefficient Aluminium nitride 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Piezoelectricity Computer Science Applications Education Crystal Crystallography chemistry.chemical_compound chemistry Transmission electron microscopy 0103 physical sciences Thin film 0210 nano-technology FOIL method Wurtzite crystal structure |
| Zdroj: | Journal of Physics: Conference Series. 773:012049 |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/773/1/012049 |
| Popis: | This study reports piezoelectric properties and crystallographic microstructures of aluminium nitride (AlN, wurtzite structure) thin films on 50 μm thick stainless steel foil. The transverse piezoelectric coefficient d31f and e31f of 10 pm thick AlN films were estimated as -1.42 ± 0.08 μm/V and -0.48 ± 0.03 C/m2 from a tip displacement of the piezoelectric cantilevers. Dielectric constant s33 was measured as 10.5 ± 1.0. An electron beam diffraction pattern by a high-resolution transmission electron microscope and x-ray diffraction pattern showed that abundance ratio of the orientation such as , and of AlN crystal on stainless steel foils increased with increasing thickness. |
| Databáze: | OpenAIRE |
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