In-situ Scanning Transmission Electron Microscopy Study on the Microstructural Characterization of a TFT-LCD Panel by a FIB/SEM
Autor: | SH Han, HN Kim, Young-Jun Park |
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Rok vydání: | 2008 |
Předmět: |
Conventional transmission electron microscope
In situ Liquid-crystal display Materials science business.industry Scanning confocal electron microscopy law.invention Characterization (materials science) Thin-film transistor law Scanning transmission electron microscopy Scanning ion-conductance microscopy Optoelectronics business Instrumentation |
Zdroj: | Microscopy and Microanalysis. 14:1020-1021 |
ISSN: | 1435-8115 1431-9276 |
Popis: | Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008 |
Databáze: | OpenAIRE |
Externí odkaz: |